Kinetic gas temperature measurements in thermal RF induction plasma using Rayleigh scattering

J. Vattulainen, R. Hernberg

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific

Translated title of the contribution	Kinetic gas temperature measurements in thermal RF induction plasma using Rayleigh scattering
Original language	English
Title of host publication	Proceedings of the 11th International Symposium on Plasma Chemistry, Loughborough, Leicestershire, England, August 22-27
Pages	228-233
Publication status	Published - 1993
Publication type	B3 Article in conference proceedings

Publication forum classification

@inproceedings{ed6df2d90523468084b9d37fb6f5011c,

title = "Kinetic gas temperature measurements in thermal RF induction plasma using Rayleigh scattering",

author = "J. Vattulainen and R. Hernberg",

note = "Contribution: organisation=fys,FACT1=1",

year = "1993",

language = "English",

pages = "228--233",

booktitle = "Proceedings of the 11th International Symposium on Plasma Chemistry, Loughborough, Leicestershire, England, August 22-27",

}

Kinetic gas temperature measurements in thermal RF induction plasma using Rayleigh scattering. / Vattulainen, J.; Hernberg, R.
Proceedings of the 11th International Symposium on Plasma Chemistry, Loughborough, Leicestershire, England, August 22-27. 1993. p. 228-233.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific

TY - GEN

T1 - Kinetic gas temperature measurements in thermal RF induction plasma using Rayleigh scattering

AU - Vattulainen, J.

AU - Hernberg, R.

N1 - Contribution: organisation=fys,FACT1=1

PY - 1993

Y1 - 1993

M3 - Conference contribution

SP - 228

EP - 233

BT - Proceedings of the 11th International Symposium on Plasma Chemistry, Loughborough, Leicestershire, England, August 22-27

ER -