Large-area nanoperforated SiN membranes for optical and mechanical filtering

J. Viheriälä, T. Niemi, J. Laukkanen, M. Karjalainen, M. Pessa

Research output: Contribution to journal › Article › Scientific › peer-review

5 Citations (Scopus)

Translated title of the contribution	Large-area nanoperforated SiN membranes for optical and mechanical filtering
Original language	English
Pages (from-to)	1620 - 1622
Journal	Microelectronic Engineering
Volume	87
Issue number	5-8
DOIs	https://doi.org/10.1016/j.mee.2009.10.033
Publication status	Published - 2010
Publication type	A1 Journal article-refereed

Publication forum classification

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title = "Large-area nanoperforated SiN membranes for optical and mechanical filtering",

author = "J. Viheri{\"a}l{\"a} and T. Niemi and J. Laukkanen and M. Karjalainen and M. Pessa",

note = "Contribution: organisation=orc,FACT1=1",

year = "2010",

doi = "10.1016/j.mee.2009.10.033",

language = "English",

volume = "87",

pages = "1620 -- 1622",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

number = "5-8",

}

TY - JOUR

T1 - Large-area nanoperforated SiN membranes for optical and mechanical filtering

AU - Viheriälä, J.

AU - Niemi, T.

AU - Laukkanen, J.

AU - Karjalainen, M.

AU - Pessa, M.

N1 - Contribution: organisation=orc,FACT1=1

PY - 2010

Y1 - 2010

U2 - 10.1016/j.mee.2009.10.033

DO - 10.1016/j.mee.2009.10.033

M3 - Article

SN - 0167-9317

VL - 87

SP - 1620

EP - 1622

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 5-8

ER -