Laser interference nanolithography

Z. Wang, J. Zhang, Z. Ji, M. Packianather, C. Peng, C. Tan, Y.K. Verevkin, S.M. Olaizola, T. Berthou, S. Tisserand

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Translated title of the contributionLaser interference nanolithography
    Original languageEnglish
    Title of host publicationICMEN, 3rd International Conference of Manufacturing Engineering, 1-3 October 2008, Chalkidiki, Greece
    Pages929-936
    Publication statusPublished - 2008
    Publication typeA4 Article in conference proceedings

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