Translated title of the contribution | Linear motor drive for micropositioning |
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Original language | English |
Title of host publication | In: Proceedings of the 4th International Conference on Machine Automation, ICMA'02, September 11-13, Tampere, Finland |
Pages | 251-258 |
Publication status | Published - 2002 |
Publication type | B3 Article in conference proceedings |
Publication forum classification
- No publication forum level