Low sidewall damage plasma etching with ICP-RIE and HBr chemistry of Si/SiGe resonant interband tunnel diodes

Si Young Park, Sung Yong Chung, Ronghua Yu, Paul R. Berger, Phillip E. Thompson

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Original languageEnglish
Title of host publication2005 International Semiconductor Device Research Symposium
Number of pages2
Publication statusPublished - 2005
Externally publishedYes
Publication typeA4 Article in conference proceedings
EventInternational Semiconductor Device Research Symposium - Bethesda, MD, United States
Duration: 7 Dec 20059 Dec 2005


ConferenceInternational Semiconductor Device Research Symposium
Country/TerritoryUnited States
CityBethesda, MD

ASJC Scopus subject areas

  • Engineering(all)

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