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Low-Temperature Route to Direct Amorphous to Rutile Crystallization of TiO2Thin Films Grown by Atomic Layer Deposition
Jesse Saari, Harri Ali-Löytty, Kimmo Lahtonen, Markku Hannula, Lauri Palmolahti, Antti Tukiainen, Mika Valden
Research output: Contribution to journal › Article › Scientific › peer-review
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