Methane/hydrogen metal organic reactive ion etching of GaInAsP compounds

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Translated title of the contribution	Methane/hydrogen metal organic reactive ion etching of GaInAsP compounds
Original language	English
Pages (from-to)	1369-1371
Journal	Electronics Letters
Volume	26
Issue number	17
DOIs	https://doi.org/10.1049/el:19900880
Publication status	Published - 1990
Publication type	A1 Journal article-refereed

Publication forum classification

@article{f2c3fc7e86ae4ae8abf23d81bbeea46e,

title = "Methane/hydrogen metal organic reactive ion etching of GaInAsP compounds",

author = "J. Keskinen and J. N{\"a}ppi and H. Asonen and M. Pessa",

note = "Contribution: organisation=fys,FACT1=1",

year = "1990",

doi = "10.1049/el:19900880",

language = "English",

volume = "26",

pages = "1369--1371",

journal = "Electronics Letters",

issn = "0013-5194",

publisher = "John Wiley \& Sons",

number = "17",

}

TY - JOUR

T1 - Methane/hydrogen metal organic reactive ion etching of GaInAsP compounds

AU - Keskinen, J.

AU - Näppi, J.

AU - Asonen, H.

AU - Pessa, M.

N1 - Contribution: organisation=fys,FACT1=1

PY - 1990

Y1 - 1990

U2 - 10.1049/el:19900880

DO - 10.1049/el:19900880

M3 - Article

SN - 0013-5194

VL - 26

SP - 1369

EP - 1371

JO - Electronics Letters

JF - Electronics Letters

IS - 17

ER -