Abstract
In the present invention there is presented a manufacturing method for producing target material pieces (17) which are used in a laser ablation process and which make possible a more efficient coating process by blending an additive suspension (12, 13) prepared in a special way with a powder (11) used as the raw material for the target material. The suspension (14) consisting of the additive (12), raw materials (11) and liquid (13) is heated and after this sintered so that a solid target material piece (17) is produced. The piece (17) produced in this way can advantageously be used as a target in the laser ablation process.
| Original language | English |
|---|---|
| Patent number | WO2017140943 (A1) |
| IPC | C04B35/01; C04B35/117; C04B35/626; C04B35/645; C08K3/04; C08L27/18 |
| Priority date | 24/08/17 |
| Publication status | Published - 24 Aug 2017 |
| Publication type | H1 Granted patent |
Keywords
- Pulsed laser deposition
- Thin films
- Graphene
- Additive