| Original language | English |
|---|---|
| Patent number | US8628678 B2 |
| IPC | G01N21/42, C03C25/68, C03C15/00 |
| Priority date | 11/10/06 |
| Publication status | Published - 14 Jan 2014 |
| Externally published | Yes |
| Publication type | H1 Granted patent |
Method for measuring the active KOH concentration in a KOH etching process
Ville Voipio (Inventor)
Research output: Patent