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Microelectrode Array With Transparent ALD TiN Electrodes
Tomi Ryynänen, Anssi Pelkonen, Kestutis Grigoras, Oili M. E. Ylivaara, Tanja Hyvärinen, Jouni Ahopelto, Mika Prunnila, Susanna Narkilahti, Jukka Lekkala
Research output: Contribution to journal › Article › Scientific › peer-review
17
Citations
(Scopus)