Micromanipulator including piezoelectric benders

P. Kallio (Inventor), Q. Zhou (Inventor), M. Novotny (Inventor), H. Koivo (Inventor), J. Kuncova (Inventor), P. Ronkanen (Inventor), P. Turunen (Inventor)

    Research output: Patent

    Translated title of the contributionMicromanipulator including piezoelectric benders
    Original languageEnglish
    Patent numberPat. US 7141914 B2
    Priority date28/11/06
    Publication statusPublished - 2006
    Publication typeH1 Granted patent

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