Models for thermal dissociation of silane on a polysilicon surface

Chemical Compounds

• Molecular Beam 84%
• Silane 67%
• Polycrystalline Solid 62%
• Dissociation 50%
• Pressure 40%
• Surface 22%

Engineering & Materials Science

• Silanes 90%
• Polysilicon 81%
• Molecular beams 41%
• Hot Temperature 33%
• Deposition rates 30%
• Scattering 22%
• Silicon 18%
• Temperature 9%

Physics & Astronomy

• thermal dissociation 100%
• silanes 76%
• silicon 25%
• molecular beams 24%
• low pressure 19%
• dissociation 19%
• coefficients 12%
• scattering 12%
• temperature 6%