Multi-beam laser interference lithography pattern

Translated title of the contribution: Multi-beam laser interference lithography pattern

Zhang Wei, Liu Weiping, Gu Xiaoyong, Chunlei Tan, Changsi Peng

    Research output: Contribution to journalArticleScientificpeer-review

    3 Citations (Scopus)
    Translated title of the contributionMulti-beam laser interference lithography pattern
    Original languageChinese
    Pages (from-to)3157-3162
    JournalHigh Power Laser and Particle Beams
    Volume23
    Issue number12
    DOIs
    Publication statusPublished - 2011
    Publication typeA1 Journal article-refereed

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