Multi-beam laser interference lithography pattern

Translated title of the contribution: Multi-beam laser interference lithography pattern

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4 Citations (Scopus)

Translated title of the contribution	Multi-beam laser interference lithography pattern
Original language	Chinese
Pages (from-to)	3157-3162
Journal	High Power Laser and Particle Beams
Volume	23
Issue number	12
DOIs	https://doi.org/10.3788/HPLPB20112312.3157
Publication status	Published - 2011
Publication type	A1 Journal article-refereed

Publication forum classification

@article{685715ae80f04acdac6b65b03354e97e,

title = "Multi-beam laser interference lithography pattern",

author = "Zhang Wei and Liu Weiping and Gu Xiaoyong and Chunlei Tan and Changsi Peng",

note = "Ulrich's: Refereed<br/>Contribution: organisation=orc,FACT1=1",

year = "2011",

doi = "10.3788/HPLPB20112312.3157",

language = "Kiina",

volume = "23",

pages = "3157--3162",

journal = "High Power Laser and Particle Beams",

issn = "1001-4322",

publisher = "Editorial Office of High Power Laser and Particle Beams",

number = "12",

}

TY - JOUR

T1 - Multi-beam laser interference lithography pattern

AU - Wei, Zhang

AU - Weiping, Liu

AU - Xiaoyong, Gu

AU - Tan, Chunlei

AU - Peng, Changsi

N1 - Ulrich's: Refereed<br/>Contribution: organisation=orc,FACT1=1

PY - 2011

Y1 - 2011

U2 - 10.3788/HPLPB20112312.3157

DO - 10.3788/HPLPB20112312.3157

M3 - Artikkeli

SN - 1001-4322

VL - 23

SP - 3157

EP - 3162

JO - High Power Laser and Particle Beams

JF - High Power Laser and Particle Beams

IS - 12

ER -