Nanoimprint devices fabricated using nanoimprint lithography

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

    Translated title of the contributionNanoimprint devices fabricated using nanoimprint lithography
    Original languageEnglish
    Title of host publicationPALS 2011 - The 5th Finnish-Russian Photonics and Laser Symposium, Saint-Petersburg, Russia, October 18 - 20, 2011
    Place of PublicationSaint-Petersburg
    PublisherPALS 2011
    Pages40-41
    Publication statusPublished - 2011
    Publication typeA4 Article in conference proceedings

    Publication series

    NameFinnish-Russian Photonics and Laser Symposium PALS
    PublisherPALS 2011

    Publication forum classification

    • No publication forum level

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