Nanoimprint lithography for photonic devices

Tapio Niemi

Nanoimprint lithography for photonic devices

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

1 Citation (Scopus)

Translated title of the contribution	Nanoimprint lithography for photonic devices
Original language	English
Title of host publication	23rd International Conference on Indium Phosphide and Related Materials - IPRM 2011, May 22-26, 2011, Berlin, Germany
Place of Publication	Piscataway, NJ
Publisher	IEEE
Pages	256-259
ISBN (Print)	978-3-8007-3356-9
Publication status	Published - 2011
Publication type	A4 Article in conference proceedings

Publication series

Name	International Conference on Indium Phosphide and Related Materials IPRM
Publisher	IEEE

Publication forum classification

Publication forum level 1

Cite this

@inproceedings{641e4512ac07412385c28b20f0a70dec,

title = "Nanoimprint lithography for photonic devices",

author = "Tapio Niemi",

note = "Tekes projects Solar III-V and Produla, EU-project DeLight, SA-projects DAUNTLESS, REDMETA, A-PLAN and ESA-project DFB.Verkkojulkaisu ja paperiversio.Ei ut-numeroa 9.4.2014<br/>Contribution: organisation=orc,FACT1=1",

year = "2011",

language = "English",

isbn = "978-3-8007-3356-9",

series = "International Conference on Indium Phosphide and Related Materials IPRM",

publisher = "IEEE",

pages = "256--259",

booktitle = "23rd International Conference on Indium Phosphide and Related Materials - IPRM 2011, May 22-26, 2011, Berlin, Germany",

}

Nanoimprint lithography for photonic devices. / Niemi, Tapio.
23rd International Conference on Indium Phosphide and Related Materials - IPRM 2011, May 22-26, 2011, Berlin, Germany. Piscataway, NJ: IEEE, 2011. p. 256-259 (International Conference on Indium Phosphide and Related Materials IPRM).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Nanoimprint lithography for photonic devices

AU - Niemi, Tapio

N1 - Tekes projects Solar III-V and Produla, EU-project DeLight, SA-projects DAUNTLESS, REDMETA, A-PLAN and ESA-project DFB.Verkkojulkaisu ja paperiversio.Ei ut-numeroa 9.4.2014<br/>Contribution: organisation=orc,FACT1=1

PY - 2011

Y1 - 2011

M3 - Conference contribution

SN - 978-3-8007-3356-9

T3 - International Conference on Indium Phosphide and Related Materials IPRM

SP - 256

EP - 259

BT - 23rd International Conference on Indium Phosphide and Related Materials - IPRM 2011, May 22-26, 2011, Berlin, Germany

PB - IEEE

CY - Piscataway, NJ

ER -