Nanoimprint lithography - Next generation nanopattering methods for nanophotonics fabrication

Jukka Viheriälä, Tapio Niemi, Juha Kontio, Markus Pessa

Research output: Chapter in Book/Report/Conference proceeding › Chapter › Scientific › peer-review

Translated title of the contribution	Nanoimprint lithography - Next generation nanopattering methods for nanophotonics fabrication
Original language	English
Title of host publication	Recent Optical and Photonic Technologies
Editors	Ki Young Kim
Place of Publication	Croatia
Publisher	InTech
Pages	275 - 298
ISBN (Print)	978-953-7619-71-8
Publication status	Published - 2010
Publication type	A3 Book chapter

Publication forum classification

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title = "Nanoimprint lithography - Next generation nanopattering methods for nanophotonics fabrication",

author = "Jukka Viheri{\"a}l{\"a} and Tapio Niemi and Juha Kontio and Markus Pessa",

note = "Contribution: organisation=orc,FACT1=1",

year = "2010",

language = "English",

isbn = "978-953-7619-71-8",

pages = "275 -- 298",

editor = "Kim, \{Ki Young\}",

booktitle = "Recent Optical and Photonic Technologies",

publisher = "InTech",

}

TY - CHAP

T1 - Nanoimprint lithography - Next generation nanopattering methods for nanophotonics fabrication

AU - Viheriälä, Jukka

AU - Niemi, Tapio

AU - Kontio, Juha

AU - Pessa, Markus

N1 - Contribution: organisation=orc,FACT1=1

PY - 2010

Y1 - 2010

M3 - Chapter

SN - 978-953-7619-71-8

SP - 275

EP - 298

BT - Recent Optical and Photonic Technologies

A2 - Kim, Ki Young

PB - InTech

CY - Croatia

ER -