Nanoimprint lithography - Next generation nanopattering methods for nanophotonics fabrication

Jukka Viheriälä, Tapio Niemi, Juha Kontio, Markus Pessa

    Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

    Translated title of the contributionNanoimprint lithography - Next generation nanopattering methods for nanophotonics fabrication
    Original languageEnglish
    Title of host publicationRecent Optical and Photonic Technologies
    EditorsKi Young Kim
    Place of PublicationCroatia
    PublisherInTech
    Pages275 - 298
    ISBN (Print)978-953-7619-71-8
    Publication statusPublished - 2010
    Publication typeA3 Book chapter

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