Nanoperforated silicon membranes fabricated by UV-nanoimprint lithography, deep reactive ion etching and atomic layer deposition

Lauri Sainiemi, Jukka Viheriälä, Tiina Sikanen, Janne Laukkanen, Tapio Niemi

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Translated title of the contribution	Nanoperforated silicon membranes fabricated by UV-nanoimprint lithography, deep reactive ion etching and atomic layer deposition
Original language	English
Pages (from-to)	1-8
Number of pages	8
Journal	Journal of Micromechanics and Microengineering
Volume	20
Issue number	7, 077001
DOIs	https://doi.org/10.1088/0960-1317/20/7/077001
Publication status	Published - 2010
Publication type	A1 Journal article-refereed

Publication forum classification

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title = "Nanoperforated silicon membranes fabricated by UV-nanoimprint lithography, deep reactive ion etching and atomic layer deposition",

author = "Lauri Sainiemi and Jukka Viheri{\"a}l{\"a} and Tiina Sikanen and Janne Laukkanen and Tapio Niemi",

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year = "2010",

doi = "10.1088/0960-1317/20/7/077001",

language = "English",

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TY - JOUR

T1 - Nanoperforated silicon membranes fabricated by UV-nanoimprint lithography, deep reactive ion etching and atomic layer deposition

AU - Sainiemi, Lauri

AU - Viheriälä, Jukka

AU - Sikanen, Tiina

AU - Laukkanen, Janne

AU - Niemi, Tapio

N1 - Contribution: organisation=orc,FACT1=1

PY - 2010

Y1 - 2010

U2 - 10.1088/0960-1317/20/7/077001

DO - 10.1088/0960-1317/20/7/077001

M3 - Article

SN - 0960-1317

VL - 20

SP - 1

EP - 8

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 7, 077001

ER -