Negative-biased diamond nucleation on silicon at a wide range of methane concentrations in hot filament chemical vapour deposition

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Translated title of the contribution	Negative-biased diamond nucleation on silicon at a wide range of methane concentrations in hot filament chemical vapour deposition
Original language	English
Pages (from-to)	1135-1141
Journal	Diamond and Related Materials
Volume	8
Publication status	Published - 1999
Publication type	A1 Journal article-refereed

Publication forum classification

@article{b499e13142c44dcd8cbc51f0e44bb6cc,

title = "Negative-biased diamond nucleation on silicon at a wide range of methane concentrations in hot filament chemical vapour deposition",

author = "D.M. Li and J. Larjo and R. Hernberg and T. M{\"a}ntyl{\"a}",

note = "Contribution: organisation=fys,FACT1=1",

year = "1999",

language = "English",

volume = "8",

pages = "1135--1141",

journal = "Diamond and Related Materials",

issn = "0925-9635",

publisher = "Elsevier",

}

TY - JOUR

T1 - Negative-biased diamond nucleation on silicon at a wide range of methane concentrations in hot filament chemical vapour deposition

AU - Li, D.M.

AU - Larjo, J.

AU - Hernberg, R.

AU - Mäntylä, T.

N1 - Contribution: organisation=fys,FACT1=1

PY - 1999

Y1 - 1999

M3 - Article

SN - 0925-9635

VL - 8

SP - 1135

EP - 1141

JO - Diamond and Related Materials

JF - Diamond and Related Materials

ER -