Noise minimized high resolution digital holographic microscopy applied to surface topography

Elena Achimova, Vladimir Abaskin, Daniel Claus, Giancarlo Pedrini, Igor Shevkunov, Vladimir Katkovnik

    Research output: Contribution to journalArticleScientificpeer-review

    11 Citations (Scopus)

    Abstract

    The topography of surface relief gratings was studied by digital holographic microscopy. The applicability of the method for quantitative measurements of surface microstructure at nanoscale was demonstrated. The method for wavefront reconstruction of surface relief from a digital hologram recorded in off-axis configuration was also applied. The main feature is noise filtration due to the presence of noise in the recorded intensity distribution and the use of all orders of the hologram. Reconstruction results proved a better effectiveness of our approach for topography studying of relief grating patterned on a ChG As2S3 - Se nanomultilayers in comparison with standard Fourier Transform and Atom Force Microscope methods.

    Original languageEnglish
    Pages (from-to)267-272
    Number of pages6
    JournalComputer Optics
    Volume42
    Issue number2
    DOIs
    Publication statusPublished - 1 Mar 2018
    Publication typeA1 Journal article-refereed

    Keywords

    • Diffraction gratings
    • Digital holography
    • Digital image processing

    Publication forum classification

    • No publication forum level

    ASJC Scopus subject areas

    • Atomic and Molecular Physics, and Optics
    • Computer Science Applications
    • Electrical and Electronic Engineering

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