Novel method for intensity correction using a simple maskless lithography device

Dhanesh Kattipparambil Rajan, Jukka-Pekka Raunio, Markus Tapani Karjalainen, Tomi Ryynänen, Jukka Lekkala

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5 Citations (Scopus)

Translated title of the contribution	Novel method for intensity correction using a simple maskless lithography device
Original language	English
Pages (from-to)	40-46
Number of pages	7
Journal	Sensors and Actuators A: Physical
Volume	194
DOIs	https://doi.org/10.1016/j.sna.2013.01.024
Publication status	Published - 2013
Publication type	A1 Journal article-refereed

Publication forum classification

@article{8185ab6e7ab049b2a3adecf80d46ec1a,

title = "Novel method for intensity correction using a simple maskless lithography device",

author = "{Kattipparambil Rajan}, Dhanesh and Jukka-Pekka Raunio and Karjalainen, {Markus Tapani} and Tomi Ryyn{\"a}nen and Jukka Lekkala",

note = "Contribution: organisation=ase,FACT1=1<br/>Portfolio EDEND: 2013-11-29<br/>Publisher name: Elsevier S.A.",

year = "2013",

doi = "10.1016/j.sna.2013.01.024",

language = "English",

volume = "194",

pages = "40--46",

journal = "Sensors and Actuators A: Physical",

issn = "0924-4247",

publisher = "Elsevier",

}

TY - JOUR

T1 - Novel method for intensity correction using a simple maskless lithography device

AU - Kattipparambil Rajan, Dhanesh

AU - Raunio, Jukka-Pekka

AU - Karjalainen, Markus Tapani

AU - Ryynänen, Tomi

AU - Lekkala, Jukka

N1 - Contribution: organisation=ase,FACT1=1<br/>Portfolio EDEND: 2013-11-29<br/>Publisher name: Elsevier S.A.

PY - 2013

Y1 - 2013

U2 - 10.1016/j.sna.2013.01.024

DO - 10.1016/j.sna.2013.01.024

M3 - Article

SN - 0924-4247

VL - 194

SP - 40

EP - 46

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

ER -