On-wafer capacitors under mechanical stress

P.H. Karjalainen, P. Heino

    Research output: Contribution to journalArticleScientificpeer-review

    2 Citations (Scopus)
    Translated title of the contributionOn-wafer capacitors under mechanical stress
    Original languageEnglish
    Pages (from-to)287-290
    JournalJournal of Electronic Packaging - Transactions of the ASME
    Volume129
    Issue number3
    DOIs
    Publication statusPublished - 2007
    Publication typeA1 Journal article-refereed

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