On-wafer capacitors under mechanical stress

P.H. Karjalainen, P. Heino

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2 Citations (Scopus)

Translated title of the contribution	On-wafer capacitors under mechanical stress
Original language	English
Pages (from-to)	287-290
Journal	Journal of Electronic Packaging - Transactions of the ASME
Volume	129
Issue number	3
DOIs	https://doi.org/10.1115/1.2753918
Publication status	Published - 2007
Publication type	A1 Journal article-refereed

Publication forum classification

@article{5a5a1ea7c98c4163a9ce447500da6689,

title = "On-wafer capacitors under mechanical stress",

author = "P.H. Karjalainen and P. Heino",

note = "Contribution: organisation=ele,FACT1=1",

year = "2007",

doi = "10.1115/1.2753918",

language = "English",

volume = "129",

pages = "287--290",

journal = "Journal of Electronic Packaging - Transactions of the ASME",

number = "3",

}

TY - JOUR

T1 - On-wafer capacitors under mechanical stress

AU - Karjalainen, P.H.

AU - Heino, P.

N1 - Contribution: organisation=ele,FACT1=1

PY - 2007

Y1 - 2007

U2 - 10.1115/1.2753918

DO - 10.1115/1.2753918

M3 - Article

VL - 129

SP - 287

EP - 290

JO - Journal of Electronic Packaging - Transactions of the ASME

JF - Journal of Electronic Packaging - Transactions of the ASME

IS - 3

ER -