Abstract
Si interband tunnel diodes have been successfully fabricated by molecular beam epitaxy and room temperature peak-to-valley current ratios of 1.7 have been achieved. The diodes consist of opposing n- and p-type δ-doped injectors separated by an intrinsic Si spacer. A “p-on-n” configuration was achieved for the first time using a novel low temperature growth technique that exploits the strong surface segregation behavior of Sb, the n-type dopant, to produce sharp delta-doped profiles adjacent to the intrinsic Si spacer.
Original language | English |
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Pages (from-to) | 290-293 |
Number of pages | 4 |
Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
Volume | 19 |
Issue number | 1 |
DOIs | |
Publication status | Published - 2001 |
Externally published | Yes |
Publication type | A1 Journal article-refereed |
ASJC Scopus subject areas
- Condensed Matter Physics
- Electrical and Electronic Engineering