| Original language | English |
|---|---|
| Patent number | WO2017144721 (A1) |
| IPC | C23C2/26,C23C22/53 |
| Priority date | 25/02/16 |
| Publication status | Published - 31 Aug 2017 |
| Publication type | H1 Granted patent |
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Research output: Patent
| Original language | English |
|---|---|
| Patent number | WO2017144721 (A1) |
| IPC | C23C2/26,C23C22/53 |
| Priority date | 25/02/16 |
| Publication status | Published - 31 Aug 2017 |
| Publication type | H1 Granted patent |