Abstract
The photoluminescence (PL) of SiSnC alloy grown by molecular beam epitaxy on Si (100) substrate is presented. Different epitaxial layers are investigated. The samples are similar in structure, and consisted of a 200 angstroms Si buffer grown on a (100) Si substrate followed by the respective alloy layer, a 4500 angstroms Si0.955Sn0.03C0.015, a 1500 angstroms Si0.96Sn0.04 or a 1500 angstroms Si0.985C0.015. The layer composition is measured by Rutherford backscattering spectrometry, and confirmed by X-ray diffraction analysis. X-ray diffraction measurements of the layers confirmed that Sn and C are substitutional and the layers are pseudomorphic and coherently strained. The Si0.955Sn0.03C0.015 allow layer is strain compensated. PL spectra of all the layers revealed band edge luminescence as well as a very sharp peak.
Original language | English |
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Pages (from-to) | 327-332 |
Number of pages | 6 |
Journal | Materials Research Society Symposium - Proceedings |
Volume | 533 |
DOIs | |
Publication status | Published - 1998 |
Externally published | Yes |
Publication type | A1 Journal article-refereed |
Event | Proceedings of the 1998 MRS Spring Symposium - San Francisco, CA, USA Duration: 13 Apr 1998 → 17 Apr 1998 |
ASJC Scopus subject areas
- General Materials Science
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering