Rapid fabrication of high aspect ratio silicon nanopillars for chemical analysis

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Translated title of the contribution	Rapid fabrication of high aspect ratio silicon nanopillars for chemical analysis
Original language	English
Pages (from-to)	7 p
Journal	Nanotechnology
Volume	18
Issue number	505303
DOIs	https://doi.org/10.1088/0957-4484/18/50/505303
Publication status	Published - 2007
Publication type	A1 Journal article-refereed

Publication forum classification

@article{88c4c371bf4445bfa6dc5c42af061fbe,

title = "Rapid fabrication of high aspect ratio silicon nanopillars for chemical analysis",

author = "L. Sainiemi and H. Keskinen and M. Aromaa and L. Luosuj{\"a}rvi and K. Grigoras and T. Kotiaho and J.M. M{\"a}kel{\"a} and S. Franssila",

note = "Contribution: organisation=fys,FACT1=1",

year = "2007",

doi = "10.1088/0957-4484/18/50/505303",

language = "English",

volume = "18",

pages = "7 p",

journal = "Nanotechnology",

issn = "0957-4484",

publisher = "IOP Publishing Ltd.",

number = "505303",

}

TY - JOUR

T1 - Rapid fabrication of high aspect ratio silicon nanopillars for chemical analysis

AU - Sainiemi, L.

AU - Keskinen, H.

AU - Aromaa, M.

AU - Luosujärvi, L.

AU - Grigoras, K.

AU - Kotiaho, T.

AU - Mäkelä, J.M.

AU - Franssila, S.

N1 - Contribution: organisation=fys,FACT1=1

PY - 2007

Y1 - 2007

U2 - 10.1088/0957-4484/18/50/505303

DO - 10.1088/0957-4484/18/50/505303

M3 - Article

SN - 0957-4484

VL - 18

SP - 7 p

JO - Nanotechnology

JF - Nanotechnology

IS - 505303

ER -