RBS analysis of sputter-deposited MgO films

P. Vuoristo, T. Mäntylä, P. Kettunen, R. Lappalainen

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Translated title of the contribution	RPS Analysis of Sputter-deposited MgO Films
Original language	English
Pages (from-to)	1001-1004
Journal	Vacuum
Volume	42
Issue number	15
DOIs	https://doi.org/10.1016/0042-207X(91)90007-6
Publication status	Published - 1991
Publication type	A1 Journal article-refereed

Publication forum classification

@article{1ca373d817134249a80b9f45c094dcce,

title = "RBS analysis of sputter-deposited MgO films",

author = "P. Vuoristo and T. M{\"a}ntyl{\"a} and P. Kettunen and R. Lappalainen",

note = "Contribution: organisation=mol,FACT1=1",

year = "1991",

doi = "10.1016/0042-207X(91)90007-6",

language = "English",

volume = "42",

pages = "1001--1004",

journal = "Vacuum",

issn = "0042-207X",

publisher = "Elsevier",

number = "15",

}