Abstract
We confirm that as the misfit strain in pseudomorphic epitaxial layer increases, surface thermodynamics controlled growth modes can change from a layer-by-layer to a three-dimensional (3-D) island mode. Both in-situ reflection high energy electron diffraction studies and in-situ scanning tunneling microscopy studies are utilized to demonstrate this transition to 3-D growth. This concept allows one to grow GaAs/InxGa1-xAs/GaAs heterostructures where the electrons in InxGa1-xAs are possibly confined in lower dimensions.
Original language | English |
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Pages (from-to) | 479-483 |
Number of pages | 5 |
Journal | Journal of Electronic Materials |
Volume | 25 |
Issue number | 3 |
DOIs | |
Publication status | Published - Mar 1996 |
Publication type | A1 Journal article-refereed |
Keywords
- InGaAs/GaAs
- Reflection high energy electron diffraction (RHEED)
- Scanning tunneling microscopy (STM)
- Strained layer growth
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Electrical and Electronic Engineering
- Materials Chemistry