Relaxation analysis of tensile-strained GaInP by means of strain-induced wafer curvature

T.V. Hakkarainen, A. Schramm, L. Toikkanen, A. Tukiainen, M. Pessa

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific

    Translated title of the contributionRelaxation analysis of tensile-strained GaInP by means of strain-induced wafer curvature
    Original languageEnglish
    Title of host publication15th European Molecular Beam Epitaxy Workshop, Zakopane, Poland, 8-11 March, 2009
    Pages2 p
    Publication statusPublished - 2009
    Publication typeB3 Article in conference proceedings

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