Roll-to-roll atomic layer deposition process for flexible electronics encapsulation applications

Philipp S. Maydannik; Tommi O. Kääriäinen; Kimmo Lahtinen; David C. Cameron; Mikko Söderlun; Pekka Soininen; Petri Johansson; Jurkka Kuusipalo; Lorenza Moro; Ziaghui Zeng

doi:10.1116/1.4893428

Roll-to-roll atomic layer deposition process for flexible electronics encapsulation applications

Philipp S. Maydannik, Tommi O. Kääriäinen, Kimmo Lahtinen, David C. Cameron, Mikko Söderlun, Pekka Soininen, Petri Johansson, Jurkka Kuusipalo, Lorenza Moro, Ziaghui Zeng

Research output: Contribution to journal › Article › Scientific › peer-review

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Translated title of the contribution	Roll-to-roll atomic layer depositon process for flexible electronics encapsulation applications
Original language	English
Article number	051603
Number of pages	7
Journal	Journal of Vacuum Science & Technology A
Volume	32
DOIs	https://doi.org/10.1116/1.4893428
Publication status	Published - 2014
Publication type	A1 Journal article-refereed

Publication forum classification

Publication forum level 1

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10.1116/1.4893428

Cite this

@article{624eb9003ac94d77a0ff3f8b46a662ad,

title = "Roll-to-roll atomic layer deposition process for flexible electronics encapsulation applications",

author = "Maydannik, \{Philipp S.\} and K{\"a}{\"a}ri{\"a}inen, \{Tommi O.\} and Kimmo Lahtinen and Cameron, \{David C.\} and Mikko S{\"o}derlun and Pekka Soininen and Petri Johansson and Jurkka Kuusipalo and Lorenza Moro and Ziaghui Zeng",

note = "Contribution: organisation=mol,FACT1=1<br/>Portfolio EDEND: 2014-12-01<br/>Publisher name: American Institute of Physics",

year = "2014",

doi = "10.1116/1.4893428",

language = "English",

volume = "32",

journal = "Journal of Vacuum Science \& Technology A",

issn = "1553-1813",

}

TY - JOUR

T1 - Roll-to-roll atomic layer deposition process for flexible electronics encapsulation applications

AU - Maydannik, Philipp S.

AU - Kääriäinen, Tommi O.

AU - Lahtinen, Kimmo

AU - Cameron, David C.

AU - Söderlun, Mikko

AU - Soininen, Pekka

AU - Johansson, Petri

AU - Kuusipalo, Jurkka

AU - Moro, Lorenza

AU - Zeng, Ziaghui

N1 - Contribution: organisation=mol,FACT1=1<br/>Portfolio EDEND: 2014-12-01<br/>Publisher name: American Institute of Physics

PY - 2014

Y1 - 2014

U2 - 10.1116/1.4893428

DO - 10.1116/1.4893428

M3 - Article

SN - 1553-1813

VL - 32

JO - Journal of Vacuum Science & Technology A

JF - Journal of Vacuum Science & Technology A

M1 - 051603

ER -