Scanner path as a manipulatable variable for optimal control and diagnostics of CD variations

J. Ylisaari, K. Konkarikoski, R. Ritala, T. Kokko, M. Mäntylä

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific

Translated title of the contribution	Scanner path as a manipulatable variable for optimal control and diagnostics of CD variations
Original language	English
Title of host publication	2008 Control Systems Pan-Pacific Conference. Conference Proceedings, June 16-18, Vancouver, Canada, 2008
Pages	81-85
ISBN (Electronic)	978-1-897023-40-2
Publication status	Published - 2008
Publication type	B3 Non-refereed article in conference proceedings

Publication forum classification

@inproceedings{0c87832ddf4f42c4b055f8a76e84b12e,

title = "Scanner path as a manipulatable variable for optimal control and diagnostics of CD variations",

author = "J. Ylisaari and K. Konkarikoski and R. Ritala and T. Kokko and M. M{\"a}ntyl{\"a}",

note = "Contribution: organisation=ase mit,FACT1=1",

year = "2008",

language = "English",

isbn = "978-1-897023-39-1",

pages = "81--85",

booktitle = "2008 Control Systems Pan-Pacific Conference. Conference Proceedings, June 16-18, Vancouver, Canada, 2008",

}

2008 Control Systems Pan-Pacific Conference. Conference Proceedings, June 16-18, Vancouver, Canada, 2008. 2008. p. 81-85.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific

TY - GEN

T1 - Scanner path as a manipulatable variable for optimal control and diagnostics of CD variations

AU - Ylisaari, J.

AU - Konkarikoski, K.

AU - Ritala, R.

AU - Kokko, T.

AU - Mäntylä, M.

N1 - Contribution: organisation=ase mit,FACT1=1

PY - 2008

Y1 - 2008

M3 - Conference contribution

SN - 978-1-897023-39-1

SP - 81

EP - 85

BT - 2008 Control Systems Pan-Pacific Conference. Conference Proceedings, June 16-18, Vancouver, Canada, 2008

ER -