Scanner path as a manipulatable variable for optimal control and diagnostics of CD variations

J. Ylisaari, K. Konkarikoski, R. Ritala, T. Kokko, M. Mäntylä

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific

    Translated title of the contributionScanner path as a manipulatable variable for optimal control and diagnostics of CD variations
    Original languageEnglish
    Title of host publication2008 Control Systems Pan-Pacific Conference. Conference Proceedings, June 16-18, Vancouver, Canada, 2008
    Pages81-85
    ISBN (Electronic)978-1-897023-40-2
    Publication statusPublished - 2008
    Publication typeB3 Non-refereed article in conference proceedings

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