Self-sustained secondary discharge in inductively coupled plasma reactor

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Translated title of the contribution	Self-sustained secondary discharge in inductively coupled plasma reactor
Original language	English
Pages (from-to)	2508-2510
Journal	Applied Physics Letters
Volume	76
Issue number	18
Publication status	Published - 2000
Publication type	A1 Journal article-refereed

Publication forum classification

@article{ce1d3b3e333148dd938bd11610797f44,

title = "Self-sustained secondary discharge in inductively coupled plasma reactor",

author = "J. Walewski and J. Larjo and R. Hernberg",

note = "Contribution: organisation=fys,FACT1=1",

year = "2000",

language = "English",

volume = "76",

pages = "2508--2510",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "18",

}