SiGe/Si heterostructures produced by double-energy Si+ and Ge+, and Ge+ and Ge2+ ion implantations

Z. Xia, E. O. Ristolainen, P. Holloway

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    3 Citations (Scopus)
    Translated title of the contributionSiGe/Si heterostructures produced by double-energy Si+ and Ge+, and Ge+ and Ge2+ ion implantations
    Original languageEnglish
    Pages (from-to)2629-2632
    JournalJournal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures, Processing, Measurement, and Phenomena
    Volume16
    Issue number5
    Publication statusPublished - 1998
    Publication typeA1 Journal article-refereed

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