Silicon capillary gripper with self-alignment capability

Veikko Sariola; Ville Liimatainen; Tatu Tolonen; Reidar Udd; Quan Zhou

doi:10.1109/ICRA.2011.5979980

Silicon capillary gripper with self-alignment capability

Veikko Sariola, Ville Liimatainen, Tatu Tolonen, Reidar Udd, Quan Zhou

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

12 Citations (Scopus)

Abstract

This paper reports a novel capillary microgripper. The microgripper is fabricated from silicon using deep reactive ion etching and is designed to be especially suitable for self-alignment. The gripper is shown to retain its self-alignment capabilities even when the head of the gripper does not match the size of the component. This mechanism is analyzed using numerical simulations and tested in pick-and-place experiments using commercial laser diode components. The advantage of the capillary microgripper has been demonstrated in picking and aligning microchips from adhesive films, which requires substantial picking force.

Original language	English
Title of host publication	2011 IEEE International Conference on Robotics and Automation, ICRA 2011
Pages	4098-4103
Number of pages	6
DOIs	https://doi.org/10.1109/ICRA.2011.5979980
Publication status	Published - 2011
Publication type	A4 Article in conference proceedings
Event	2011 IEEE International Conference on Robotics and Automation, ICRA 2011 - Shanghai, China Duration: 9 May 2011 → 13 May 2011

Conference

Conference	2011 IEEE International Conference on Robotics and Automation, ICRA 2011
Country/Territory	China
City	Shanghai
Period	9/05/11 → 13/05/11

Keywords

Capillary gripper
Micro/nano robots
Microhandling
Self-alignment

ASJC Scopus subject areas

Software
Artificial Intelligence
Control and Systems Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/ICRA.2011.5979980

Cite this

@inproceedings{aed426a7b28c41d885880a1fd173e937,

title = "Silicon capillary gripper with self-alignment capability",

abstract = "This paper reports a novel capillary microgripper. The microgripper is fabricated from silicon using deep reactive ion etching and is designed to be especially suitable for self-alignment. The gripper is shown to retain its self-alignment capabilities even when the head of the gripper does not match the size of the component. This mechanism is analyzed using numerical simulations and tested in pick-and-place experiments using commercial laser diode components. The advantage of the capillary microgripper has been demonstrated in picking and aligning microchips from adhesive films, which requires substantial picking force.",

keywords = "Capillary gripper, Micro/nano robots, Microhandling, Self-alignment",

author = "Veikko Sariola and Ville Liimatainen and Tatu Tolonen and Reidar Udd and Quan Zhou",

year = "2011",

doi = "10.1109/ICRA.2011.5979980",

language = "English",

isbn = "9781612843865",

pages = "4098--4103",

booktitle = "2011 IEEE International Conference on Robotics and Automation, ICRA 2011",

note = "2011 IEEE International Conference on Robotics and Automation, ICRA 2011 ; Conference date: 09-05-2011 Through 13-05-2011",

}

TY - GEN

T1 - Silicon capillary gripper with self-alignment capability

AU - Sariola, Veikko

AU - Liimatainen, Ville

AU - Tolonen, Tatu

AU - Udd, Reidar

AU - Zhou, Quan

PY - 2011

Y1 - 2011

N2 - This paper reports a novel capillary microgripper. The microgripper is fabricated from silicon using deep reactive ion etching and is designed to be especially suitable for self-alignment. The gripper is shown to retain its self-alignment capabilities even when the head of the gripper does not match the size of the component. This mechanism is analyzed using numerical simulations and tested in pick-and-place experiments using commercial laser diode components. The advantage of the capillary microgripper has been demonstrated in picking and aligning microchips from adhesive films, which requires substantial picking force.

AB - This paper reports a novel capillary microgripper. The microgripper is fabricated from silicon using deep reactive ion etching and is designed to be especially suitable for self-alignment. The gripper is shown to retain its self-alignment capabilities even when the head of the gripper does not match the size of the component. This mechanism is analyzed using numerical simulations and tested in pick-and-place experiments using commercial laser diode components. The advantage of the capillary microgripper has been demonstrated in picking and aligning microchips from adhesive films, which requires substantial picking force.

KW - Capillary gripper

KW - Micro/nano robots

KW - Microhandling

KW - Self-alignment

UR - http://www.scopus.com/inward/record.url?scp=84871673357&partnerID=8YFLogxK

U2 - 10.1109/ICRA.2011.5979980

DO - 10.1109/ICRA.2011.5979980

M3 - Conference contribution

AN - SCOPUS:84871673357

SN - 9781612843865

SP - 4098

EP - 4103

BT - 2011 IEEE International Conference on Robotics and Automation, ICRA 2011

T2 - 2011 IEEE International Conference on Robotics and Automation, ICRA 2011

Y2 - 9 May 2011 through 13 May 2011

ER -

Silicon capillary gripper with self-alignment capability

Abstract

Conference

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this