Soft stamp UV-nanoimprint lithography for fabrication of laser diodes

J. Viheriälä, M.-R. Viljanen, J. Kontio, T. Leinonen, J. Tommila, M. Dumitrescu, T. Niemi, M. Pessa

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    19 Citations (Scopus)
    Translated title of the contributionSoft stamp UV-nanoimprint lithography for fabrication of laser diodes
    Original languageEnglish
    Article number033004
    Pages (from-to)033004-1-033004-8
    JournalJournal of Micro-Nanolithography MEMS and MOEMS
    Volume8
    DOIs
    Publication statusPublished - 2009
    Publication typeA1 Journal article-refereed

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