@article{b0b98bc7ec70423bb7e45788cf4ce25d,
title = "Soft stamp UV-nanoimprint lithography for fabrication of laser diodes",
author = "J. Viheri{\"a}l{\"a} and M.-R. Viljanen and J. Kontio and T. Leinonen and J. Tommila and M. Dumitrescu and T. Niemi and M. Pessa",
note = "Contribution: organisation=orc,FACT1=1",
year = "2009",
doi = "10.1117/1.3158307",
language = "English",
volume = "8",
pages = "033004--1--033004--8",
journal = "Journal of Micro-Nanolithography MEMS and MOEMS",
issn = "1932-5150",
publisher = "SPIE",
}