Soft UV-nanoimprint lithography for the fabrication of frequency selective components

J. Viheriälä; J. Tommila; A. Laakso; S. Ranta; I. Vartiainen; H. Tuovinen; J. Telkkälä; T. Vallius; T. Niemi; M. Dumitrescu; M. Pessa

Soft UV-nanoimprint lithography for the fabrication of frequency selective components

J. Viheriälä
, J. Tommila
, A. Laakso
, S. Ranta
, I. Vartiainen
, H. Tuovinen
, J. Telkkälä
, T. Vallius
, T. Niemi
, M. Dumitrescu
, M. Pessa

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

Translated title of the contribution	Soft UV-nanoimprint lithography for the fabrication of frequency selective components
Original language	English
Title of host publication	CLEO Europe - EQEC 2009, 14 - 19 June 2009, Munich, Germany
Pages	1 p
Publication status	Published - 2009
Publication type	A4 Article in conference proceedings

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Cite this

@inproceedings{1601b259c5df4710bfe2d708f8516490,

title = "Soft UV-nanoimprint lithography for the fabrication of frequency selective components",

author = "J. Viheri{\"a}l{\"a} and J. Tommila and A. Laakso and S. Ranta and I. Vartiainen and H. Tuovinen and J. Telkk{\"a}l{\"a} and T. Vallius and T. Niemi and M. Dumitrescu and M. Pessa",

note = "Contribution: organisation=orc,FACT1=1",

year = "2009",

language = "English",

isbn = "978-1-4244-4080-1",

pages = "1 p",

booktitle = "CLEO Europe - EQEC 2009, 14 - 19 June 2009, Munich, Germany",

}

TY - GEN

T1 - Soft UV-nanoimprint lithography for the fabrication of frequency selective components

AU - Viheriälä, J.

AU - Tommila, J.

AU - Laakso, A.

AU - Ranta, S.

AU - Vartiainen, I.

AU - Tuovinen, H.

AU - Telkkälä, J.

AU - Vallius, T.

AU - Niemi, T.

AU - Dumitrescu, M.

AU - Pessa, M.

N1 - Contribution: organisation=orc,FACT1=1

PY - 2009

Y1 - 2009

M3 - Conference contribution

SN - 978-1-4244-4080-1

SP - 1 p

BT - CLEO Europe - EQEC 2009, 14 - 19 June 2009, Munich, Germany

ER -