Spiral inductors with multi-strip coils processed on sapphire and bulk silicon substrates

Research output: Contribution to journal › Article › Scientific › peer-review

Translated title of the contribution	Spiral inductors with multi-strip coils processed on sapphire and bulk silicon substrates
Original language	English
Pages (from-to)	206-216
Journal	Journal of Microelectronics and Electronic Packaging
Volume	1
Issue number	4
Publication status	Published - 2004
Publication type	A1 Journal article-refereed

Publication forum classification

@article{4c08a034f31e4420afea5249fae60712,

title = "Spiral inductors with multi-strip coils processed on sapphire and bulk silicon substrates",

author = "P. Karjalainen and J. Rapelo and E. Ristolainen",

note = "Contribution: organisation=ele,FACT1=1",

year = "2004",

language = "English",

volume = "1",

pages = "206--216",

journal = "Journal of Microelectronics and Electronic Packaging",

issn = "1551-4897",

publisher = "IMAPS-International Microelectronics and Packaging Society",

number = "4",

}

TY - JOUR

T1 - Spiral inductors with multi-strip coils processed on sapphire and bulk silicon substrates

AU - Karjalainen, P.

AU - Rapelo, J.

AU - Ristolainen, E.

N1 - Contribution: organisation=ele,FACT1=1

PY - 2004

Y1 - 2004

M3 - Article

SN - 1551-4897

VL - 1

SP - 206

EP - 216

JO - Journal of Microelectronics and Electronic Packaging

JF - Journal of Microelectronics and Electronic Packaging

IS - 4

ER -