Stoichiometry and Impurities in Sputtered Alumina Films on Copper

P. Vuoristo, T. Mäntylä, P. Kettunen, R. Lappalainen

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    37 Citations (Scopus)
    Translated title of the contributionStoichiometry and Impurities in Sputtered Alumina Films on Copper
    Original languageEnglish
    Pages (from-to)297-311
    JournalThin Solid Films
    Volume204
    Publication statusPublished - 1991
    Publication typeA1 Journal article-refereed

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