Strength of Ta-Si interfaces by molecular dynamics

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Translated title of the contribution	Strength of Ta-Si interfaces by molecular dynamics
Original language	English
Pages (from-to)	645-650
Journal	Microelectronics Reliability
Issue number	43
Publication status	Published - 2003
Publication type	A1 Journal article-refereed

Publication forum classification

@article{d7233416de324182ac36c5e34a199dc9,

title = "Strength of Ta-Si interfaces by molecular dynamics",

author = "P. Heino and E. Ristolainen",

note = "Contribution: organisation=ele,FACT1=1",

year = "2003",

language = "English",

pages = "645--650",

journal = "Microelectronics Reliability",

issn = "0026-2714",

publisher = "Elsevier Limited",

number = "43",

}