Substrate and annealing dependent cryslallization of Si/SiO2 superlattice structures

S. Karirinne, J-T. Keränen, T. Lepistö, J. Sinkkonen

Research output: Contribution to journal › Article › Scientific › peer-review

Translated title of the contribution	Substrate and annealing dependent cryslallization of Si/SiO2 superlattice structures
Original language	English
Pages (from-to)	419-422
Journal	Institute of Physics Conference Series
Issue number	169
Publication status	Published - 2002
Publication type	A1 Journal article-refereed

Publication forum classification

@article{294c1268f9954f7fa6537180f7f45c73,

title = "Substrate and annealing dependent cryslallization of Si/SiO2 superlattice structures",

author = "S. Karirinne and J-T. Ker{\"a}nen and T. Lepist{\"o} and J. Sinkkonen",

note = "Ulrich's: refereed<br/>Contribution: organisation=mol elm,FACT1=1",

year = "2002",

language = "English",

pages = "419--422",

journal = "Institute of Physics Conference Series",

number = "169",

}

TY - JOUR

T1 - Substrate and annealing dependent cryslallization of Si/SiO2 superlattice structures

AU - Karirinne, S.

AU - Keränen, J-T.

AU - Lepistö, T.

AU - Sinkkonen, J.

N1 - Ulrich's: refereed<br/>Contribution: organisation=mol elm,FACT1=1

PY - 2002

Y1 - 2002

M3 - Article

SP - 419

EP - 422

JO - Institute of Physics Conference Series

JF - Institute of Physics Conference Series

IS - 169

ER -