@inproceedings{e98100ee02414ebebb0270e821e8ad29,
title = "Surface processes in diamond chemical vapor deposition",
author = "D'Evelyn, \{M. P.\} and Rawles, \{R. E.\} and Hukka, \{T. I.\} and Pakkanen, \{T. A.\}",
note = "Contribution: organisation=kem,FACT1=1",
year = "1994",
language = "English",
pages = "425--430",
editor = "S. Saito",
booktitle = "Advances in new diamond science and technology, International conference on new diamond science and technology, 4th, Kobe, Japan, July 18-22, 1994",
}