Thermometry of gas layers in thermal plasma CVD by pulsed-laser Rayleigh scattering

J. Larjo, J. Vattulainen, R. Hernberg

Research output: Contribution to journal › Article › Scientific › peer-review

5 Citations (Scopus)

Translated title of the contribution	Thermometry of gas layers in thermal plasma CVD by pulsed-laser Rayleigh scattering
Original language	English
Pages (from-to)	71-75
Journal	Applied Physics B-Lasers and Optics
Volume	62
Publication status	Published - 1996
Publication type	A1 Journal article-refereed

Publication forum classification

@article{be28909b201d43c29bb171e2063e22d4,

title = "Thermometry of gas layers in thermal plasma CVD by pulsed-laser Rayleigh scattering",

author = "J. Larjo and J. Vattulainen and R. Hernberg",

note = "Contribution: organisation=fys,FACT1=1",

year = "1996",

language = "English",

volume = "62",

pages = "71--75",

journal = "Applied Physics B-Lasers and Optics",

issn = "0946-2171",

publisher = "Springer Verlag",

}