Third-harmonic generation microscopy of undeveloped photopolymerized structures

Leevi Kallioniemi; Shambhavee Annurakshita; Godofredo Bautista

doi:10.1364/OSAC.405126

Third-harmonic generation microscopy of undeveloped photopolymerized structures

Leevi Kallioniemi, Shambhavee Annurakshita, Godofredo Bautista

Physics

Research output: Contribution to journal › Article › Scientific › peer-review

Abstract

Third-harmonic generation (THG) microscopy is demonstrated as a powerful technique to visualize undeveloped photopolymerized microstructures within a negative photoresist film. By comparing the THG microscopy images of developed and undeveloped single-photon polymerized structures in a SU-8 film, THG was found to provide sufficient contrast for distinguishing polymerized and unpolymerized regions. This also suggests that the technique can be used as a complementary technique to visualize the effect of photoresist development where microstructure shrinkage could occur. In addition, we applied the technique to visualize a three-photon polymerized microstructure that was fabricated in the same microscopy setup. This demonstrates the potential of the technique for in situ microscopy of photopolymerized microstructures in three dimensions.

Original language	English
Pages (from-to)	2961-2967
Number of pages	7
Journal	OSA Continuum
Volume	3
Issue number	11
DOIs	https://doi.org/10.1364/OSAC.405126
Publication status	Published - 1 Nov 2020
Publication type	A1 Journal article-refereed

Keywords

Dark field microscopy
High numerical aperture optics
Optical coherence tomography
Raman microscopy
Scanning electron microscopy
X ray microscopy

Publication forum classification

Publication forum level 1

Access to Document

10.1364/OSAC.405126Licence: Other

third_harmonic_generation_microscopy
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http://urn.fi/URN:NBN:fi:tuni-202103102498Licence: Other

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title = "Third-harmonic generation microscopy of undeveloped photopolymerized structures",

abstract = "Third-harmonic generation (THG) microscopy is demonstrated as a powerful technique to visualize undeveloped photopolymerized microstructures within a negative photoresist film. By comparing the THG microscopy images of developed and undeveloped single-photon polymerized structures in a SU-8 film, THG was found to provide sufficient contrast for distinguishing polymerized and unpolymerized regions. This also suggests that the technique can be used as a complementary technique to visualize the effect of photoresist development where microstructure shrinkage could occur. In addition, we applied the technique to visualize a three-photon polymerized microstructure that was fabricated in the same microscopy setup. This demonstrates the potential of the technique for in situ microscopy of photopolymerized microstructures in three dimensions.",

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KW - Optical coherence tomography

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KW - Scanning electron microscopy

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