Third-harmonic generation microscopy of undeveloped photopolymerized structures

Research output: Contribution to journalArticleScientificpeer-review

Abstract

Third-harmonic generation (THG) microscopy is demonstrated as a powerful technique to visualize undeveloped photopolymerized microstructures within a negative photoresist film. By comparing the THG microscopy images of developed and undeveloped single-photon polymerized structures in a SU-8 film, THG was found to provide sufficient contrast for distinguishing polymerized and unpolymerized regions. This also suggests that the technique can be used as a complementary technique to visualize the effect of photoresist development where microstructure shrinkage could occur. In addition, we applied the technique to visualize a three-photon polymerized microstructure that was fabricated in the same microscopy setup. This demonstrates the potential of the technique for in situ microscopy of photopolymerized microstructures in three dimensions.
Original languageEnglish
Pages (from-to)2961-2967
Number of pages7
JournalOSA Continuum
Volume3
Issue number11
DOIs
Publication statusPublished - 1 Nov 2020
Publication typeA1 Journal article-refereed

Keywords

  • Dark field microscopy
  • High numerical aperture optics
  • Optical coherence tomography
  • Raman microscopy
  • Scanning electron microscopy
  • X ray microscopy

Publication forum classification

  • Publication forum level 1

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