Abstract
Third-harmonic generation (THG) microscopy is demonstrated as a powerful technique to visualize undeveloped photopolymerized microstructures within a negative photoresist film. By comparing the THG microscopy images of developed and undeveloped single-photon polymerized structures in a SU-8 film, THG was found to provide sufficient contrast for distinguishing polymerized and unpolymerized regions. This also suggests that the technique can be used as a complementary technique to visualize the effect of photoresist development where microstructure shrinkage could occur. In addition, we applied the technique to visualize a three-photon polymerized microstructure that was fabricated in the same microscopy setup. This demonstrates the potential of the technique for in situ microscopy of photopolymerized microstructures in three dimensions.
Original language | English |
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Pages (from-to) | 2961-2967 |
Number of pages | 7 |
Journal | OSA Continuum |
Volume | 3 |
Issue number | 11 |
DOIs | |
Publication status | Published - 1 Nov 2020 |
Publication type | A1 Journal article-refereed |
Keywords
- Dark field microscopy
- High numerical aperture optics
- Optical coherence tomography
- Raman microscopy
- Scanning electron microscopy
- X ray microscopy
Publication forum classification
- Publication forum level 1