Third-harmonic generation microscopy of undeveloped photopolymerized structures

Leevi Kallioniemi; Shambhavee Annurakshita; Godofredo Bautista

doi:10.1364/OSAC.405126

Third-harmonic generation microscopy of undeveloped photopolymerized structures

Leevi Kallioniemi, Shambhavee Annurakshita, Godofredo Bautista

Physics

Research output: Contribution to journal › Article › Scientific › peer-review

1 Citation (Scopus)

6 Downloads (Pure)

Abstract

Third-harmonic generation (THG) microscopy is demonstrated as a powerful technique to visualize undeveloped photopolymerized microstructures within a negative photoresist film. By comparing the THG microscopy images of developed and undeveloped single-photon polymerized structures in a SU-8 film, THG was found to provide sufficient contrast for distinguishing polymerized and unpolymerized regions. This also suggests that the technique can be used as a complementary technique to visualize the effect of photoresist development where microstructure shrinkage could occur. In addition, we applied the technique to visualize a three-photon polymerized microstructure that was fabricated in the same microscopy setup. This demonstrates the potential of the technique for in situ microscopy of photopolymerized microstructures in three dimensions.

Original language	English
Pages (from-to)	2961-2967
Number of pages	7
Journal	OSA Continuum
Volume	3
Issue number	11
DOIs	https://doi.org/10.1364/OSAC.405126
Publication status	Published - 1 Nov 2020
Publication type	A1 Journal article-refereed

Keywords

Dark field microscopy
High numerical aperture optics
Optical coherence tomography
Raman microscopy
Scanning electron microscopy
X ray microscopy

Publication forum classification

Publication forum level 1

Access to Document

10.1364/OSAC.405126Licence: Other

third_harmonic_generation_microscopy
© 2020 Optical Society of America. Users may use, reuse, and build upon the article, or use the article for text or data mining, so long as such uses are for non-commercial purposes and appropriate attribution is maintained. All other rights are reserved.
Final published version, 895 KBLicence: Other

http://urn.fi/URN:NBN:fi:tuni-202103102498Licence: Other

Cite this

@article{59f3f09fc66d444c9096bd71eeaf7a5f,

title = "Third-harmonic generation microscopy of undeveloped photopolymerized structures",

abstract = "Third-harmonic generation (THG) microscopy is demonstrated as a powerful technique to visualize undeveloped photopolymerized microstructures within a negative photoresist film. By comparing the THG microscopy images of developed and undeveloped single-photon polymerized structures in a SU-8 film, THG was found to provide sufficient contrast for distinguishing polymerized and unpolymerized regions. This also suggests that the technique can be used as a complementary technique to visualize the effect of photoresist development where microstructure shrinkage could occur. In addition, we applied the technique to visualize a three-photon polymerized microstructure that was fabricated in the same microscopy setup. This demonstrates the potential of the technique for in situ microscopy of photopolymerized microstructures in three dimensions.",

keywords = "Dark field microscopy, High numerical aperture optics, Optical coherence tomography, Raman microscopy, Scanning electron microscopy, X ray microscopy",

author = "Leevi Kallioniemi and Shambhavee Annurakshita and Godofredo Bautista",

year = "2020",

month = nov,

day = "1",

doi = "10.1364/OSAC.405126",

language = "English",

volume = "3",

pages = "2961--2967",

number = "11",

}

TY - JOUR

T1 - Third-harmonic generation microscopy of undeveloped photopolymerized structures

AU - Kallioniemi, Leevi

AU - Annurakshita, Shambhavee

AU - Bautista, Godofredo

PY - 2020/11/1

Y1 - 2020/11/1

N2 - Third-harmonic generation (THG) microscopy is demonstrated as a powerful technique to visualize undeveloped photopolymerized microstructures within a negative photoresist film. By comparing the THG microscopy images of developed and undeveloped single-photon polymerized structures in a SU-8 film, THG was found to provide sufficient contrast for distinguishing polymerized and unpolymerized regions. This also suggests that the technique can be used as a complementary technique to visualize the effect of photoresist development where microstructure shrinkage could occur. In addition, we applied the technique to visualize a three-photon polymerized microstructure that was fabricated in the same microscopy setup. This demonstrates the potential of the technique for in situ microscopy of photopolymerized microstructures in three dimensions.

AB - Third-harmonic generation (THG) microscopy is demonstrated as a powerful technique to visualize undeveloped photopolymerized microstructures within a negative photoresist film. By comparing the THG microscopy images of developed and undeveloped single-photon polymerized structures in a SU-8 film, THG was found to provide sufficient contrast for distinguishing polymerized and unpolymerized regions. This also suggests that the technique can be used as a complementary technique to visualize the effect of photoresist development where microstructure shrinkage could occur. In addition, we applied the technique to visualize a three-photon polymerized microstructure that was fabricated in the same microscopy setup. This demonstrates the potential of the technique for in situ microscopy of photopolymerized microstructures in three dimensions.

KW - Dark field microscopy

KW - High numerical aperture optics

KW - Optical coherence tomography

KW - Raman microscopy

KW - Scanning electron microscopy

KW - X ray microscopy

U2 - 10.1364/OSAC.405126

DO - 10.1364/OSAC.405126

M3 - Article

VL - 3

SP - 2961

EP - 2967

IS - 11

ER -

Third-harmonic generation microscopy of undeveloped photopolymerized structures

Abstract

Keywords

Publication forum classification

Access to Document

Fingerprint

Cite this