Toward the Atomically Abrupt Interfaces of SiOx/Semiconductor Junctions

Mikhail Kuzmin, Pekka Laukkanen, Jaakko Mäkelä, Muhammad Yasir, Marjukka Tuominen, Johnny Dahl, Marko P J Punkkinen, Kalevi Kokko, Hannu Pekka Hedman, Jongyun Moon, Risto Punkkinen, Mika Lastusaari, Ville Polojärvi, Ville-Markus Korpijärvi, Mircea Guina

    Research output: Contribution to journalArticleScientificpeer-review

    2 Citations (Scopus)
    Original languageEnglish
    Article number1500510
    JournalAdvanced Materials Interfaces
    Volume3
    Issue number11
    Early online date1 Mar 2016
    DOIs
    Publication statusPublished - Jun 2016
    Publication typeA1 Journal article-refereed

    Keywords

    • Interface reactions
    • Oxide films
    • Semiconductors
    • Spectroscopic methods
    • Transistors

    Publication forum classification

    • Publication forum level 1

    ASJC Scopus subject areas

    • Mechanical Engineering
    • Mechanics of Materials

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