Transmission electron energy-loss spectroscopy measurements of the dialectric function of Si/Sio2 multilayers

J. Keränen, T. Lepistö, L. Ryen, S.V. Novikov, E. Olsson

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    5 Citations (Scopus)
    Translated title of the contributionTransmission electron energy-loss spectroscopy measurements of the dialectric function of Si/Sio2 multilayers
    Original languageEnglish
    Pages (from-to)6827-6831
    JournalJournal of Applied Physics
    Volume84
    Issue number12
    Publication statusPublished - 1998
    Publication typeA1 Journal article-refereed

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