Use of microcutting for high throughput electrode patterning on a flexible substrate

M. Janka, S. Tuukkanen, H. Tuorila, J. Viheriälä, M. Honkanen, N. Stingelin, D. Lupo

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    Abstract

    The use of printing technologies is promising for low-cost manufacturing of flexible, light-weight and large-area electronics, such as electronic paper or solar cells. Here, we demonstrate a microcutting technique and methods to fabricate cutting blades for the patterning of metal structure on a polymer substrate. Microcutting is done using a hot embossing and nanoimprinting techniques. The metallic fine patterns obtained by using stamps fabricated using different techniques are compared. Combination of microcutting and our recently proposed dielectric alignment opens up a novel platform for a variety of applications, such as the fabrication of metal crossover or organic field effect transistors as well as contact resistance measurement of metal-semiconductor junctions.

    Translated title of the contributionUse of microcutting for high throughput electrode patterning on a flexible substrate
    Original languageEnglish
    Article number015015
    Number of pages7
    JournalJournal of Micromechanics and Microengineering
    Volume24
    Issue number1
    DOIs
    Publication statusPublished - Jan 2014
    Publication typeA1 Journal article-refereed

    Keywords

    • microcutting
    • self-alignment
    • NIL
    • hot embossing
    • FIELD-EFFECT TRANSISTORS
    • NANOIMPRINT LITHOGRAPHY
    • THIN
    • CIRCUITS
    • FILMS
    • STEP

    Publication forum classification

    • Publication forum level 2

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