Abstract
The use of printing technologies is promising for low-cost manufacturing of flexible, light-weight and large-area electronics, such as electronic paper or solar cells. Here, we demonstrate a microcutting technique and methods to fabricate cutting blades for the patterning of metal structure on a polymer substrate. Microcutting is done using a hot embossing and nanoimprinting techniques. The metallic fine patterns obtained by using stamps fabricated using different techniques are compared. Combination of microcutting and our recently proposed dielectric alignment opens up a novel platform for a variety of applications, such as the fabrication of metal crossover or organic field effect transistors as well as contact resistance measurement of metal-semiconductor junctions.
Translated title of the contribution | Use of microcutting for high throughput electrode patterning on a flexible substrate |
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Original language | English |
Article number | 015015 |
Number of pages | 7 |
Journal | Journal of Micromechanics and Microengineering |
Volume | 24 |
Issue number | 1 |
DOIs | |
Publication status | Published - Jan 2014 |
Publication type | A1 Journal article-refereed |
Keywords
- microcutting
- self-alignment
- NIL
- hot embossing
- FIELD-EFFECT TRANSISTORS
- NANOIMPRINT LITHOGRAPHY
- THIN
- CIRCUITS
- FILMS
- STEP
Publication forum classification
- Publication forum level 2
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Kallio, P. (Manager) & Väliaho, J. (Contact)
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