@inproceedings{6994c5d6b5a14f5e9f010bb1b9a379a9,
title = "Vacuum arc carbon film deposition and characterization",
author = "J. Koskinen and J.-P. Hirvonen and H.-J. Scheibe and M. Kaukonen and R. Nieminen and J. Ker{\"a}nen",
note = "Contribution: organisation=mol elm,FACT1=1",
year = "1995",
language = "English",
series = "Tampere University of Technology, Department of Electrical Engineering, Report",
publisher = "Tampere University of Technology",
number = "7-95",
pages = "67--70",
editor = "R. Hernberg and J. Saaristo",
booktitle = "Proceedings of VII Finnish Conference on Physics in Industry, Finland, Tampere, November 1-2, 1995",
}