Vacuum arc carbon film deposition and characterization

J. Koskinen, J.-P. Hirvonen, H.-J. Scheibe, M. Kaukonen, R. Nieminen, J. Keränen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific

    Translated title of the contributionVacuum arc carbon film deposition and characterization
    Original languageEnglish
    Title of host publicationProceedings of VII Finnish Conference on Physics in Industry, Finland, Tampere, November 1-2, 1995
    EditorsR. Hernberg, J. Saaristo
    Place of PublicationTampere
    PublisherTampere University of Technology
    Pages67-70
    Publication statusPublished - 1995
    Publication typeB3 Article in conference proceedings

    Publication series

    NameTampere University of Technology, Department of Electrical Engineering, Report
    PublisherTampere University of Technology
    Number7-95

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