Wet etching of dilute nitride GaInNAs, GaInNAsSb, and GaNAsSb alloys lattice-matched to GaAs

Marianna Raappana, Ville Polojärvi, Arto Aho, Jaakko Mäkelä, Timo Aho, Antti Tukiainen, Pekka Laukkanen, Mircea Guina

    Research output: Contribution to journalArticleScientificpeer-review

    2 Citations (Scopus)
    10 Downloads (Pure)

    Abstract

    We have studied the etching of GaInNAs, GaInNAsSb, and GaNAsSb alloys by NH4OH, H2SO4, and H3PO4 based solutions. NH4OH based solutions resulted in smooth surface, while other solutions created rougher and granular surfaces. The etch rates were found to increase with the Sb content. For GaInNAs, x-ray photoelectron spectroscopy revealed the enrichment of In on the etched surfaces, indicating In or In oxides having a smaller removal rate compared to Ga or Ga oxides. The enrichment of In was associated with smoother surfaces after etching and an enhanced photoluminescence caused by lower surface recombination due to reduced surface state density.

    Original languageEnglish
    Pages (from-to)268-274
    Number of pages7
    JournalCorrosion Science
    Volume136
    DOIs
    Publication statusPublished - 15 May 2018
    Publication typeA1 Journal article-refereed

    Keywords

    • A. Alloy
    • B. AFM
    • B. XPS
    • C. Acid corrosion
    • C. Alkaline corrosion
    • C. Passivity

    Publication forum classification

    • Publication forum level 3

    ASJC Scopus subject areas

    • Chemistry(all)
    • Chemical Engineering(all)
    • Materials Science(all)

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