@inproceedings{ef9e9ff0adde44c4a3eeefd3466ae2d2,
title = "A maskless exposure device for rapid photolithographic prototyping of sensor and microstructure layouts",
author = "Kattipparambil, {Rajan Dhanes} and Jukka Lekkala",
note = "Contribution: organisation=ase mit,FACT1=1",
year = "2010",
doi = "10.1016/j.proeng.2010.09.115",
language = "English",
pages = "1--4",
editor = "Bernhard Jakoby and Michael Vellekop",
booktitle = "Eurosensors XXIV. Conference Proceedings (preliminary CD-ROM issue), September 5-8, 2010, Linz, Austria",
}